Diamond Slurries for General Purpose / DAMD Diamond Slurries

 

Introduction:

Dynaqual™ DAMD monocrystalline diamond slurry is developed using Qual Diamond’s latest NanoCapsu™ technology. The NanoCap™ technology is based on nano-capsulation of QD-surface treated diamond particles and specifically formulated slurry matrix.

The advantages brought by NanoCap™ technology are many. These include faster material removal rate (MMR), great parallelism in planarization, improved first-time yield (FTY) rate, and superior surface finish, just to name a few.

Features:

  • Optimized zeta potential and advanced deagglomeration of nano-diamond particles.

  • Optimized slurry viscosity and surface-enveloped property for prolonged retention on the substrate/pad surfaces.

  • High removal rate reducing processing time from days and hours to minutes.

  • Significantly reduced dig/scratch numbers due to NanoCapsu™ technology.

  • Reduced slurry usage and waste from gallons to milliliters.

  • Easy post-processing clean up.

  • Fantastic surface roughness — single angstrom-scale surface can be achieved.

  • High first-time yield.

  • Single-step polishing/finish with superior topography performance can be achieved!

  • Extremely suitable for achieving the stringent requirements in optics, metallography, ceramics, and semiconductor industries..